130nm node CMOS Process (CS90A)
Features
Technology Code
CS90A
Transistor
UHS
110
2.9
HS
110
2.9
1.2
678
-276
4
ST
110
2.9
LL
110
Physical Gate Length (nm)
Gate Oxide Thickness (nm)
Supply Voltage (V)
NMOS Ids (µA/µm)
PMOS Ids (µA/µm)
NMOS Ioff (nA/µm)
PMOS Ioff (nA/µm)
Gate Leak Current (nA/µm)
Basic Gate Delay (ps)
Number of Available Poly Layer
Number of Available Metal Layer
Via Filling
2.9
1.2
1.2
1.2
780
-321
36
570
-218
0.18
-0.22
0.01
28
390
-150
0.005
-0.015
0.01
45
-18
0.01
14
-3.1
0.01
17
Mie plant
1
8Cu+1Al
Cu Dual Damascene
Hybrid Low-k
ILD Structure
SRAM Cell Size (µm2)
Dual Gate Oxide Options
Mixed Signal Options
RF Elements
1.98
Available
Available
MIM cap., Poly Resistor, Inductor
RAM Redundancy
Fuse
Technology Roadmap
1000
180-nm
Cu
130-nm
Cu+Low+k
500
90-nm
Cu+VLK
65-nm
45-nm
32-nm
CS80/80A
200
100
50
CS90A
CS100A_LL
CS100A_G
For ASIC & COT
CS90
CS200A_LL
CS200A_G
CS100
For COT
CS200
20
G: Generic, LL: Low Leakage
1998 2000 2002
10
2004
2006
2008
2010
2012
Year (Production Start)
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